With its Multiple Off-focus 3D Image Comparison Technology, Cube Scan Technology overcame the traditional optical resolution limitations and now it can not only measure the nanometer-level CD patterns, but also detect the hard-to-see defects inside the HAR (High Aspect Ratio) patterns. Cube Scan Technology is applicable on both AEGIS and IRIS platforms.

Applications

Profile Measurement for FinFET Structure
Defect Inspection for HAR Process