Cube Scan Technology
With its Multiple Off-focus 3D Image Comparison Technology, Cube Scan Technology overcame the traditional optical resolution limitations and now it can not only measure the nanometer-level CD patterns, but also detect the hard-to-see defects inside the HAR (High Aspect Ratio) patterns. Cube Scan Technology is applicable on both AEGIS and IRIS platforms.
Profile Measurement for FinFET Structure
Defect Inspection for HAR Process